Supporting innovation in semiconductor manufacturing requires environments that perform at the highest level—often within the tightest constraints. RMW partnered with Syska Hennessey Group to transform KLA’s existing, non-clean space into a highly customized Class 10,000 clean room and laboratory environment supporting advanced equipment testing and Electron Beam (E-Beam) development.

Located within an active, multi-building campus, the project challenged the team to adapt an irregular, low-clearance floor plate into a precision-controlled environment—without disrupting operations above or around the space. The solution required meticulous space planning, intensive BIM coordination, and close collaboration with mechanical, structural, and partners to integrate FFUs, dense utility systems, specialized tool layouts, and constrained equipment pathways.

Rather than relying on standardized clean room templates, RMW tailored each zone to specific user needs, accommodating multiple lab groups, complex equipment transfers, and carefully sequenced gowning and circulation paths. Mechanical systems were rerouted through façades and service yards, transforming exterior constraints into functional assets.

The result is a purpose-built clean room that fits seamlessly within its existing shell—unlocking new capabilities for KLA while demonstrating RMW’s ability to deliver high-performance technical environments in the most challenging conditions.

Credits

RMW Team

SCB, General Contractor
Syska Hennessey Group, MEP Engineering Consultant
PASE, Structural Consultant
HMH, Civil Engineer
RMW, Photography